The monolithic incorporation of electrical and optical components is critically important for achieving high-speed on-chip signal processing, but yet hard to satisfy the explosive growth in the demands on bandwidth and information density. Three-dimensional (3D) circuits, which are desirable for their improved performance in data handling, are ideal candidates to simultaneously promise high-capacity computing with improved speed and energy efficiency. In such highly integrated circuits, however, the selective electrical modulation of light signals is still difficult to achieve owing to the lack of controllable integration of microscale optical functional devices and modulation units. In this work, we demonstrate an electrically modulated microlaser module on a 3D-integrated microsystem composed of a dye-doped polymeric microcavity and an underneath microscale electrical heating circuit. The lasing mode was modulated based on electrical heating-assisted thermo-optic response of the polymeric matrices, which were further fabricated into coupled microdisks, yielding wavelength-tunable single-mode microlasers with selective electrical modulation. On this basis, a prototype of electrically controlled microlaser module with reduced signal crosstalk was achieved. The results will provide a useful enlightenment for the rational design of novel tunable optical devices with more complicated functionalities under far-field regulation, paving the way for the on-chip optoelectronic integration.

电气和光学组件的单片集成对于实现高速片上信号处理至关重要，但仍难以满足带宽和信息密度需求的爆炸性增长。三维（3D）电路因其在数据处理方面的改进性能而理想，因此是同时承诺以提高的速度和能源效率实现大容量计算的理想候选者。然而，在这样的高度集成电路中，由于缺乏可控制的微型光学功能器件和调制单元的集成，仍然难以实现光信号的选择性电调制。在这项工作中，我们演示了在3D集成微系统上的电调制微激光器模块，该系统由染料掺杂的聚合物微腔和下面的微型电加热电路组成。基于聚合物基体的电加热辅助热光响应来调制激光模式，然后进一步将其制造成耦合的微盘，从而产生具有选择性电调制的波长可调单模微激光。在此基础上，实现了具有减小的信号串扰的电控微激光模块的原型。该结果将为在远场调节下具有更复杂功能的新型可调光学器件的合理设计提供有益的启示，为片上光电集成铺平道路。基于聚合物基体的电加热辅助热光响应来调制激光模式，然后进一步将其制造成耦合的微盘，从而产生具有选择性电调制的波长可调单模微激光。在此基础上，实现了具有减小的信号串扰的电控微激光模块的原型。该结果将为在远场调节下具有更复杂功能的新型可调光学器件的合理设计提供有益的启示，为片上光电集成铺平道路。基于聚合物基体的电加热辅助热光响应来调制激光模式，然后进一步将其制造成耦合的微盘，从而产生具有选择性电调制的波长可调单模微激光。在此基础上，实现了具有减小的信号串扰的电控微激光模块的原型。该结果将为在远场调节下具有更复杂功能的新型可调光学器件的合理设计提供有益的启示，为片上光电集成铺平道路。在此基础上，实现了具有减小的信号串扰的电控微激光模块的原型。该结果将为在远场调节下具有更复杂功能的新型可调谐光学器件的合理设计提供有益的启示，为片上光电集成铺平道路。在此基础上，实现了具有减小的信号串扰的电控微激光模块的原型。该结果将为在远场调节下具有更复杂功能的新型可调光学器件的合理设计提供有益的启示，为片上光电集成铺平道路。