Microactuators developed from shape memory alloy (SMA) thin films on flexible substrates find good applications in MEMS design. This article presents the models of the actuation behaviour of a thin film SMA bimorph, developed by depositing CuAlNi SMA on a curved Kapton polyimide sheet substrate through a physical evaporation technique. The thermo-mechanical behaviour of the bimorph is analyzed by actuating it through Joule heating, for various inputs. During heating, the CuAlNi SMA film produces a forward displacement and in the cooling cycle, the curved flexible substrate substantiates for a bias force to recover the bimorph to its original shape, thus revealing the shape memory effect. Modelling and simulation are essential for decision making and control to involve the SMA bimorph in applications since the model help to understand the input–output performances. The article briefs about the models developed from mathematical analysis and simulation based on the physics involved in the bimorph SMA structures; analytical models of the bimorph are developed for the thermal and mechanical responses and, a simulation model is developed to obtain its actuation. The results of the models developed coincide with the experimental outputs in the actuation voltage range of 1–2.5 V.

由柔性基板上的形状记忆合金 (SMA) 薄膜开发的微致动器在 MEMS 设计中得到了很好的应用。本文介绍了薄膜 SMA 双晶片的驱动行为模型，该模型是通过物理蒸发技术将 CuAlNi SMA 沉积在弯曲的 Kapton 聚酰亚胺片基板上而开发的。双晶片的热机械行为是通过焦耳加热驱动它来分析的，用于各种输入。在加热过程中，CuAlNi SMA 薄膜产生正向位移，在冷却循环中，弯曲的柔性基板证实了偏置力，将双晶片恢复到其原始形状，从而揭示了形状记忆效应。建模和仿真对于在应用中涉及 SMA 双晶的决策和控制至关重要，因为该模型有助于了解输入-输出性能。文章简要介绍了基于双压电晶片SMA结构所涉及的物理学的数学分析和模拟开发的模型；为热和机械响应开发了双晶片的分析模型，并开发了模拟模型以获得其驱动。开发的模型结果与 1-2.5 V 驱动电压范围内的实验输出一致。开发了一个模拟模型以获得其驱动。开发的模型结果与 1-2.5 V 驱动电压范围内的实验输出一致。开发了一个模拟模型以获得其驱动。开发的模型结果与 1-2.5 V 驱动电压范围内的实验输出一致。