Abstract
Microactuators developed from shape memory alloy (SMA) thin films on flexible substrates find good applications in MEMS design. This article presents the models of the actuation behaviour of a thin film SMA bimorph, developed by depositing CuAlNi SMA on a curved Kapton polyimide sheet substrate through a physical evaporation technique. The thermo-mechanical behaviour of the bimorph is analyzed by actuating it through Joule heating, for various inputs. During heating, the CuAlNi SMA film produces a forward displacement and in the cooling cycle, the curved flexible substrate substantiates for a bias force to recover the bimorph to its original shape, thus revealing the shape memory effect. Modelling and simulation are essential for decision making and control to involve the SMA bimorph in applications since the model help to understand the input–output performances. The article briefs about the models developed from mathematical analysis and simulation based on the physics involved in the bimorph SMA structures; analytical models of the bimorph are developed for the thermal and mechanical responses and, a simulation model is developed to obtain its actuation. The results of the models developed coincide with the experimental outputs in the actuation voltage range of 1–2.5 V.
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References
Abu Zaiter A, Nafea M, Mohd. Faudzi AA, Kazi S, Mohamed Ali MS (2015) Thermomechanical behaviour of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation. Microsyst Technol 22(8):2125–2131. https://doi.org/10.1007/s00542-015-2641-1
Akash K, Mani Prabu SS, Shukla AK, Nath T, Karthick S, Palani IA (2017) Investigations on the life cycle behaviour of CuAlNi/polyimide shape memory alloy bi-morph at varying substrate thickness and actuation conditions. Sens Actuators A Phys 254:28–35. https://doi.org/10.1016/j.sna.2016.12.008
Akash K, Shukla AK, Mani Prabu SS, Narayane DC, Kanmanisubbu S, Palani IA (2017) Parametric investigations to enhance the thermo mechanical properties of CuAlNi shape memory alloy Bi-morph. J Alloys Comp 720:264–271. https://doi.org/10.1016/j.jallcom.2017.05.255
Araujo VEA, Gastien R, Zelaya E, Beiroa JI, Corro I, Sade M, Lovey FC (2015) Effects on the martensitic transformations and the microstructure of CuAlNi single crystals after ageing at 473 K. J Alloys Comp 641:155–161. https://doi.org/10.1016/j.jallcom.2015.04.065
Choudhary N, Kaur D (2016) Shape memory alloy thin films and heterostructures for MEMS applications: a review. Sens Actuators A Phys 242:162–181. https://doi.org/10.1016/j.sna.2016.02.026
Ezzat MA, El-Bary AA (2012) MHD free convection flow with fractional heat conduction law. Magnetohydrodynamics 48(4):503–522
Fu Y, Du H, Huang W, Zhang S, Hu M (2004) TiNi-based thin films in MEMS applications: a review. Sens Actuators A Phys 112(2–3):395–408. https://doi.org/10.1016/j.sna.2004.02.019
Fu YQ, Luo JK, Hu M, Du HJ, Flewitt AJ, Milne WI (2005) Micromirror structure actuated by TiNi shape memory thin films. J Micromech Microeng 15(10):1872–1877. https://doi.org/10.1088/0960-1317/15/10/012
Fu YQ, Luo JK, Flewitt AJ, Huang WM, Zhang S, Du HJ, Milne WI (2009) Thin film shape memory alloys and microactuators. Int J Comput Mater Sci Surf Eng 2:208. https://doi.org/10.1504/IJCMSSE.2009.027483
Ghobadi A, Beni YT, Golestanian H (2019) Size dependent thermo-electro-mechanical nonlinear bending analysis of flex electric nano-plate in the presence of magnetic field. Int J Mech Sci 152:118–137. https://doi.org/10.1016/j.ijmecsci.2018.12.049
http://www.lookpolymers.com/polymer_DuPont-Kapton-300HN-Polyimide-Film-75-Micron-Thickness.php. Accessed 24 Nov 2020
Huang W (2002) On the selection of shape memory alloys for actuators. Mater Des 23(1):11–19. https://doi.org/10.1016/s0261-3069(01)00039-5
Ishida A (2013) Progress in thin-film shape-memory-alloy actuators. In: 2013 transducers and eurosensors XXVII: the 17th international conference on solid-state sensors, actuators and microsystems (transducers and eurosensors XXVII). https://doi.org/10.1109/transducers.2013.6627083
Jayachandran S, Akash K, Mani Prabu SS, Manikandan M, Muralidharan M, Brolin A, Palani IA (2019) Investigations on performance viability of NiTi, NiTiCu, CuAlNi and CuAlNiMn shape memory alloy/Kapton composite thin film for actuator application. Compos Part B Eng 176:107182. https://doi.org/10.1016/j.compositesb.2019.107182
Graczykowski B, Biskupski P, Mroz B, Mielcarek S, Nó ML, San Juan J (2010) Elastic properties of Cu/Al/Ni shape memory alloys studied by dynamic mechanical analysis. Smart Mater Struct 19:15010. https://doi.org/10.1088/0964-1726/19/1/015010
Kotnur VG, Tichelaar FD, Fu WT, De Hosson JTM, Janssen GCAM (2014) Shape memory NiTi thin films deposited on polyimide at low temperature. Surf Coat Technol 258:1145–1151. https://doi.org/10.1016/j.surfcoat.2014.07.018
Lammel G, Schweizer S, Renaud P (2002) Optical microscanners and microspectrometers using thermal bimorph actuators. Kluwer Academic Publishers, Dordrecht. https://doi.org/10.1007/978-1-4757-6083-5
Li L, Chew ZJ (2014) Microactuators: design and technology. Smart Sens MEMS. https://doi.org/10.1533/9780857099297.2.305
Lovey FC, Condó AM, Guimpel J, Yacamán MJ (2008) Shape memory effect in thin films of a Cu–Al–Ni alloy. Mater Sci Eng A481–482:426–430. https://doi.org/10.1016/j.msea.2007.01.175
Mehralian F, Beni YT (2018) Vibration analysis of size-dependent bimorph functionally graded piezoelectric cylindrical shell based on nonlocal strain gradient theory. J Braz Soc Mech Sci Eng 40(1):27. https://doi.org/10.1007/s40430-017-0938-y
Pengwang E, Rakotondrabe K, Micky-Andreff N (2016) Scanning micromirror platform based on MEMS technology for medical application. Micromachines. https://doi.org/10.3390/mi7020024
Potekhina W (2019) Review of electrothermal actuators and applications. Actuators. https://doi.org/10.3390/act8040069
Pal S, Xie H (2010) Analysis and simulation of curved bimorph microactuators. In: Technical Proceedings of the 2010 NSTI nanotechnology conference and expo, pp 685–688
San Juan J, Gómez-Cortés JF, López GA, Jiao C, Nó ML (2014) Long-term superelastic cycling at nano-scale in Cu–Al–Ni shape memory alloy micropillars. Appl Phys Lett 104:1–6. https://doi.org/10.1063/1.4860951
Shin DD, Mohanchandra KP, Carman GP (2005) Development of hydraulic linear actuator using thin film SMA. Sens Actuators A Phys 119(1):151–156. https://doi.org/10.1016/j.sna.2004.01.025
Velazquez R, Pissaloux EE (2012) Modelling and temperature control of shape memory alloys with fast electrical heating. Int J Mech Control 13(2):3–10
Yin H, Yan Y, Huo Y, Sun Q (2013) Rate dependent damping of single crystal CuAlNi shape memory alloy. Mater Lett 109:287–290. https://doi.org/10.1016/j.matlet.2013.07.062
Acknowledgements
The authors sincerely acknowledge the support from Mechatronics and Instrumentation lab, Indian Institute of Technology Indore for fabricating the CuAlNi/Polyimide SMA bimorph samples.
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Vetriselvi, V., Dhanalakshmi, K. & Geetha, M. Modelling the steady state response of CuAlNi/polyimide bimorph actuator. Microsyst Technol 28, 2455–2465 (2022). https://doi.org/10.1007/s00542-022-05369-7
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DOI: https://doi.org/10.1007/s00542-022-05369-7