In this paper, SP4T (Single Pole four throw) type RF MEMS Switch is designed for Satellite applications. The beam thickness of the switch is varying from 1 μm, 1.5 μm, and 2 μm. The capacitive and series beam is designed with 3 models. The device is a combination of series and shunt made up of 4 capacitive switches and 4 series switches. By using the COMSOL Multiphysics tool, we obtained the series switch has 8.9 V pull-in voltage and the shunt switch has 10 V at a beam thickness of 1 μm and the related capacitance ratio is 112. Using the HFSS method, performance analysis is found to achieve isolation and insertion loss at 62 dB and 0.4 dB at 14 GHz.

在本文中，SP4T（单刀四掷）型射频 MEMS 开关专为卫星应用而设计。开关的光束厚度在 1 μm、1.5 μm 和 2 μm 之间变化。电容式和串联梁设计有 3 种型号。该器件是由4个电容开关和4个串联开关组成的串联和并联组合。通过使用 COMSOL Multiphysics 工具，我们获得了串联开关的吸合电压为 8.9 V，并联开关的吸合电压为 10 V，梁厚为 1 μm，相关电容比为 112。使用 HFSS 方法，发现了性能分析在 62 dB 和 14 GHz 时实现 0.4 dB 的隔离和插入损耗。