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Design and analysis of SP4T RF MEMS switch for satellite applications

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Abstract

In this paper, SP4T (Single Pole four throw) type RF MEMS Switch is designed for Satellite applications. The beam thickness of the switch is varying from 1 μm, 1.5 μm, and 2 μm. The capacitive and series beam is designed with 3 models. The device is a combination of series and shunt made up of 4 capacitive switches and 4 series switches. By using the COMSOL Multiphysics tool, we obtained the series switch has 8.9 V pull-in voltage and the shunt switch has 10 V at a beam thickness of 1 μm and the related capacitance ratio is 112. Using the HFSS method, performance analysis is found to achieve isolation and insertion loss at 62 dB and 0.4 dB at 14 GHz.

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Acknowledgements

The Authors would like to thank to NMDC supported by NPMASS, Govt. of India for providing the necessary computational tool. The authors would like to Thanks the Reviewers for their valuable suggestions to improve the quality of the manuscript.

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The authors of the manuscript did not receive any funding, grants, or in-kind support in support of the research or the preparation of the manuscript.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to Be University), Green Fields, Vaddeswaram, Guntur, Andhra Pradesh, India

    S. Girish Gandhi, I. Govardhani, M. Venkata Narayana & K. Srinivasa Rao

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  1. S. Girish Gandhi
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  2. I. Govardhani
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  3. M. Venkata Narayana
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  4. K. Srinivasa Rao
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Correspondence to S. Girish Gandhi.

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All authors have participated in (a) conception and design, or analysis and interpretation of the data; (b) drafting the article or revising it critically for important intellectual content; and (c) approval of the final version. This manuscript has not been submitted to, nor is under review at, another journal or other publishing venue. The authors have no affiliation with any organization with a direct or indirect financial interest in the subject matter discussed in the manuscript. The authors have no conflict of interests.

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Gandhi, S.G., Govardhani, I., Narayana, M.V. et al. Design and analysis of SP4T RF MEMS switch for satellite applications. Microsyst Technol 28, 2765–2774 (2022). https://doi.org/10.1007/s00542-022-05347-z

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  • DOI: https://doi.org/10.1007/s00542-022-05347-z

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