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Design of Measuring and Controlling Circuit for Digital Output MEMS Gyroscope with Zero Output Correction
MAPAN ( IF 1.0 ) Pub Date : 2022-07-23 , DOI: 10.1007/s12647-022-00579-w
Cheng Ma , Shanshan Cao , Shuang Leng

Angular velocity measurement is a very important measurement parameter in industrial manufacturing field and different scientific applications. The design of gyro measurement and control circuit is always the most challenging and reliable task of angular velocity measurement system. This paper introduces the design and implementation of a measurement and control circuit for digital output of gyro for angular velocity measurement. The design of measuring and controlling circuit with high precision digital output is presented. A method of on-chip scale factor and zero output compensation correction for angular velocity measurement is introduced. Peak detection and proportional integral controller are used to replace the phase-locked loop in the driving circuit, which makes the driving loop of gyro system have good robustness. A sigma-delta (ΣΔ) digital-to-analog converter is designed for digital output of angular velocity signal. Finally, the least square method is used to evaluate the nonlinearity of angular velocity measurement system according to test results, and the zero output and scale factor uncertainty of the measurement system are evaluated.



中文翻译:

带零输出校正的数字输出MEMS陀螺测控电路设计

角速度测量是工业制造领域和不同科学应用中非常重要的测量参数。陀螺测控电路的设计一直是角速度测量系统中最具挑战性和可靠性的任务。介绍了一种用于角速度测量的陀螺数字输出测控电路的设计与实现。介绍了高精度数字输出测控电路的设计。介绍了一种角速度测量的片上比例因子和零输出补偿校正方法。采用峰值检测和比例积分控制器代替驱动电路中的锁相环,使陀螺系统的驱动环路具有良好的鲁棒性。sigma-delta (ΣΔ) 数模转换器设计用于角速度信号的数字输出。最后,根据测试结果,采用最小二乘法对角速度测量系统的非线性进行评价,并对测量系统的零输出和比例因子不确定度进行了评价。

更新日期:2022-07-25
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