Abstract

A solution to the boundary problem for describing the formation of peaks of electrons elastically reflected from multicomponent samples is presented. It is shown that the problem leads to Lyapunov-type equations and allows the construction of an effective numerical solution. A small-angle theory for the elastic reflection of electrons from multicomponent materials is developed, which makes it possible to obtain analytical solutions that describe the intensity of the peaks of electrons reflected from various target components. A method is developed for interpreting and quantitatively processing the peaks of elastically reflected electrons, taking into account multiple scattering effects.

中文翻译：

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多组分靶中的多重弹性散射过程对弹性反射电子峰强度的影响

摘要

提出了一种边界问题的解决方案，用于描述从多组分样品中弹性反射的电子峰的形成。结果表明，该问题导致 Lyapunov 型方程，并允许构建有效的数值解。开发了一种用于多组分材料电子弹性反射的小角度理论，这使得获得描述从各种目标组分反射的电子峰强度的解析解成为可能。考虑到多重散射效应，开发了一种用于解释和定量处理弹性反射电子峰的方法。