Ultra-Precision Machining (UPM) is a kind of highly accurate processing technology developed to satisfy the manufacturing requirements of high-end cutting-edge products including nuclear energy producers, very large-scale integrated circuits, lasers, and aircraft. The information asymmetry phenomenon widely exists in the design and control of ultra-precision machining. It may lead to inconsistency between the designed performance and operational performance of the UPM equipment on stiffness, thermal stability, and motion accuracy, which result from its design, manufacturing, and control, and determine the form accuracy and surface roughness of machined parts. The performance of the UPM equipment should be improved continuously. It is still challenging to realize the real-time and self-adaptive control, in which building a high-fidelity and computationally efficient digital twin is a valuable solution. Nevertheless, the incorporation of the digital twin technology into the UPM design and control remains vague and sometimes contradictory. Based on a literature search in the Google Scholar database, the critical issues in the UPM design and control, and how to use the digital twin technologies to promote it, are reviewed. Firstly, the digital twins-based UPM design, including bearings module design, spindle-drive module design, stage system module design, servo module design, and clamping module design, are reviewed. Secondly, the digital twins-based UPM control studies, including voxel modeling, process planning, process monitoring, vibration control, and quality prediction, are reviewed. The key enabling technologies and research directions of digital twins-based design and control are discussed to deal with the information asymmetry phenomenon in UPM.

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基于数字孪生的超精密加工智能设计与控制：综述

超精密加工（UPM）是为满足核能生产商、超大规模集成电路、激光器、飞机等高端尖端产品的制造需求而开发的一种高精度加工技术。信息不对称现象广泛存在于超精密加工的设计与控制中。它可能导致 UPM 设备在刚度、热稳定性和运动精度等方面的设计性能与运行性能不一致，这是其设计、制造和控制的结果，并决定了加工零件的形状精度和表面粗糙度。芬欧汇川设备的性能应不断提高。实现实时自适应控制仍然具有挑战性，其中构建高保真且计算效率高的数字孪生是一种有价值的解决方案。然而，将数字孪生技术纳入芬欧汇川设计和控制的做法仍然含糊不清，有时还相互矛盾。基于谷歌学术数据库中的文献检索，回顾了芬欧汇川设计和控制中的关键问题，以及如何利用数字孪生技术对其进行推广。首先，回顾了基于数字孪生的UPM设计，包括轴承模块设计、主轴驱动模块设计、平台系统模块设计、伺服模块设计和夹紧模块设计。其次，回顾了基于数字孪生的 UPM 控制研究，包​​括体素建模、过程规划、过程监控、振动控制和质量预测。