For improving flow rate of multi-chamber piezoelectric pump with active valves, principle and structure of multi-chamber piezoelectric pump based on pumping unit with double circular piezoelectric unimorph actuators (CPUAs) are proposed. Double CPUAs are coaxially and symmetrically arranged on top and bottom of pump chamber and work in same frequency and phase at same time to provide driving force for pump. Two active piezoelectric valves with annular boundary are designed on left and right of pumping unit to ensure the multi-chamber piezoelectric pump bidirectionally pump fluid with high control accuracy and stop characteristics. Process compatible with printed circuit board (PCB) process is used to manufacture pump to ensure low cost. Flow rate model is established to numerically simulate flow characteristics of the pump. Pump is also experimentally tested and analyzed. Results show that proposed principle and structure can effectively improve flow rate and out pressure of multi-chamber piezoelectric pump with high control accuracy and stop characteristics of flow. Moreover, flow rate model can accurately describe its flow characteristics, which will be beneficial to design and optimize multi-chamber piezoelectric pumps with active valves. Proposed principle and structure of multi-chamber piezoelectric pumps with active valves have potential applications in complex microfluidic systems such as biochemical analysis, drug delivery and chip cooling.

为提高带主动阀的多腔压电泵的流量，提出了基于双圆形压电单压电晶片执行器（CPUA）抽油机的多腔压电泵的原理和结构。双CPUA同轴对称布置在泵室的顶部和底部，同频同相工作，为泵提供驱动力。抽油机左右两侧设计了两个环形边界的有源压电阀，保证多腔压电泵双向泵送流体具有较高的控制精度和停止特性。与印刷电路板（PCB）工艺兼容的工艺用于制造泵以确保低成本。建立流量模型对泵的流动特性进行数值模拟。泵也经过实验测试和分析。结果表明，所提出的原理和结构能有效提高多腔压电泵的流量和出水压力，并具有较高的控制精度和流量停止特性。此外，流量模型可以准确地描述其流动特性，这将有利于带主动阀的多腔压电泵的设计和优化。提出的带有主动阀的多腔压电泵的原理和结构在复杂的微流体系统中具有潜在的应用，如生化分析、药物输送和芯片冷却。此外，流量模型可以准确地描述其流动特性，这将有利于带主动阀的多腔压电泵的设计和优化。提出的带有主动阀的多腔压电泵的原理和结构在复杂的微流体系统中具有潜在的应用，如生化分析、药物输送和芯片冷却。此外，流量模型可以准确地描述其流动特性，这将有利于带主动阀的多腔压电泵的设计和优化。提出的带有主动阀的多腔压电泵的原理和结构在复杂的微流体系统中具有潜在的应用，如生化分析、药物输送和芯片冷却。