We report on a novel high power vertical cavity surface emitting laser (VCSEL) with high order shallow surface grating, which enables a single mode operation even for 6mm long devices. A high single mode power of over 3W is obtained under pulsed operations for a 6mm long oxide aperture. A fan-shape beam with sub-degree narrow divergence is obtained up to high injection currents of 5A. Thanks to the low effective index of slow-light modes in a VCSEL structure, the grating pitch is over 2.5μm, which can be made by using a standard photo-lithography. The simple fabrication process and potentials of high power and high beam quality could make the proposed laser to be a good candidate for 3D optical sensing and imaging applications.

我们报告了一种具有高阶浅表面光栅的新型高功率垂直腔表面发射激光器 (VCSEL)，即使对于 6mm 长的器件也能实现单模操作。对于 6mm 长的氧化物孔径，在脉冲操作下获得超过 3W 的高单模功率。在高达 5A 的高注入电流时，可获得具有亚度窄发散度的扇形光束。由于 VCSEL 结构中慢光模式的有效指数低，光栅间距超过 2.5 μ m，可以使用标准光刻技术制造。简单的制造工艺和高功率和高光束质量的潜力可以使所提出的激光器成为 3D 光学传感和成像应用的良好候选者。