The influence of the bilayer number on the microstructure, mechanical properties, adhesion strength and tribological behaviors of the WB₂/Cr multilayer films was systematically investigated in the present study. Five groups of WB₂/Cr films with the same modulation ratio were synthesized by magnetron sputtering technique. The crystalline structure of the films was determined by X-ray diffraction. The morphologies and the microstructure of the films were observed by scanning electron microscopy, atomic force microscopy and transmission electron microscopy. Furthermore, Nano indenter, scratch tester and ball-on-disc tribometer were used to evaluate the mechanical and tribological properties. As bilayer numbers varied from 5 to 40, the hardness increased first and then decreased with the maximum hardness of 33.9 GPa when the bilayer number is 30. The H/E^* and H³/E^*2 values calculated to evaluate the fracture toughness showed the similar changing trend with hardness. The adhesion strength reached the maximum of 67 N when the bilayer number is 30. The surface roughness and friction coefficient decreased with increasing bilayer number. The wear mechanism was also investigated, and the results suggested that the multilayer film with bilayer number of 30 exhibited the best wear resistance (1.78 × 10^–7 mm³/Nm), benefiting from the contribution of high hardness, fracture toughness and adhesion strength.

本研究系统地研究了双层数量对WB ₂ /Cr 多层膜的微观结构、机械性能、粘附强度和摩擦学行为的影响。五组WB ₂采用磁控溅射技术合成了具有相同调制比的/Cr薄膜。薄膜的晶体结构由 X 射线衍射确定。通过扫描电子显微镜、原子力显微镜和透射电子显微镜观察薄膜的形貌和微观结构。此外，使用纳米压头、划痕测试仪和球盘摩擦计来评估机械和摩擦学性能。如双层号码从5变化到40时，硬度先增加，然后用33.9 GPA的最大硬度降低时的双层数目是30。ħ / ë ^*和ħ ³ / ë ^{* 2}用于评估断裂韧性的计算值显示出与硬度相似的变化趋势。当双层数为30时，粘合强度达到最大值67 N。表面粗糙度和摩擦系数随着双层数的增加而降低。还研究了磨损机制，结果表明双层数为 30 的多层膜表现出最好的耐磨性（1.78 × 10 ^–7 mm ³ /Nm），受益于高硬度、断裂韧性和粘附强度的贡献.