We observed the spatial and temporal changes of the electron density (n _e) and the electron temperature (T _e) of hydrogen plasmas around a laser-produced Sn plasma EUV source. The plasma parameters were measured by the laser Thomson scattering (LTS) method. In the experiment, the Sn plasmas are produced in H₂ gas at a pressure of 50–200Pa and the hydrogen plasmas were induced by radiation from the Sn plasmas. The LTS measurements were performed at distances 30–90mm away from the Sn plasmas. In all cases, the strong bremsstrahlung radiation of the Sn plasmas easily overwhelmed the weak LTS signals. To suppress noise due to the radiation, the solid angle of radiation from the Sn plasmas was restricted. The experimental results show that the n _e was in the order of 10¹⁷m⁻³ and T _e was around 0.7eV.

我们观察了激光产生的 Sn 等离子体 EUV 源周围氢等离子体的电子密度 ( n _e ) 和电子温度 ( T _e )的空间和时间变化。通过激光汤姆森散射（LTS）方法测量等离子体参数。在实验中，Sn 等离子体是在 H ₂中产生的压力为 50-200Pa 的气体，氢等离子体是由 Sn 等离子体的辐射诱发的。LTS 测量是在距 Sn 等离子体 30-90 毫米的距离处进行的。在所有情况下，Sn 等离子体的强韧致辐射很容易压倒微弱的 LTS 信号。为了抑制辐射引起的噪声，锡等离子体辐射的立体角受到限制。实验结果表明，该Ñ _Ë是在10的顺序¹⁷米^-3和Ť _Ë约为0.7EV。