Microscratch test with a spherical indenter was carried out on copper under different tilt conditions and applied loads. Influence of surface slope and applied load on scratch responses such as friction coefficient, residual groove width, penetration depth was quantified by simple (e.g., linear, quadratic, and power-law) expressions. Apparent friction coefficient for non-tilt condition can be obtained by correcting the results measured for a prior known surface slope. Contact area is believed to be confined in the front side of the indenter with pile-up of material contributing to the horizontally projected area and a minor segment for the vertically projected area. The radius of spherical indenter can be calibrated on a reference material from residual groove width and penetration depth data.

使用球形压头在不同倾斜条件和施加载荷下对铜进行微划痕测试。表面坡度和施加的载荷对划痕响应的影响，例如摩擦系数、剩余凹槽宽度、穿透深度，通过简单的（例如，线性、二次和幂律）表达式量化。非倾斜条件下的表观摩擦系数可以通过校正先前已知表面坡度的测量结果来获得。接触区域被认为被限制在压头的前侧，材料堆积在水平投影区域和垂直投影区域的小部分。球形压头的半径可以根据剩余凹槽宽度和穿透深度数据在参考材料上校准。