Abstract

Two excitation methods based on 2D normal mode were proposed using two piezoelectric transducers (PZTs) with opposite phase and in-phase to excite the two dimensional normal modes of (1, 1) and (2, 1), respectively. The theoretical models of the excitation modes were deduced by the wave equation. An ultrasonic separator was built and the acoustic simulation of the ultrasonic excitation modes was modeled in Ansys software. The simulation results of the sound pressure distribution in the flow channel show that (1, 1) and (2, 1) are successfully excited. The micro-separator with 8 mm width and 0.2 mm high flow channel was fabricated on silicon on insulator (SOI) by micro-processing technology to form a perfect reflection layer of the separator. An experimental platform was established and the results show that both excitation methods can achieve the separation of suspended particles with high-through of 100 μL/min. In the experiment of (1, 1) excitation method, it can be seen that most of the particles converge in the center of the separation cavity into a large bunch, and in the experiment of (2, 1) excitation method, the particles mainly converge on both sides of the separation chamber. Both methods can successfully separate suspended particles out of the fluid.

中文翻译：

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基于二维普通模式的高通量双模式超声微分离器

摘要

提出了两种基于二维正常模式的激励方法，分别使用两个具有相反相位和同相的压电换能器（PZT）来激发（1，1）和（2，1）的二维正常模式。通过波动方程推导了激励模式的理论模型。建立了超声分离器，并在Ansys软件中对超声激发模式的声学模拟进行了建模。流道中声压分布的仿真结果表明，（1，1）和（2，1）被成功激发。通过微处理技术，在绝缘体上硅（SOI）上制备了宽度为8 mm，高流动通道为0.2 mm的微隔板，以形成理想的隔板反射层。。在（1，1）激发法实验中，可以看到大多数粒子会聚在分离腔的中心成大束，在（2，1）激发法实验中，粒子主要是会聚在分离室的两侧。两种方法都可以成功地将悬浮颗粒从流体中分离出来。