Irradiation of yttria-stabilized zirconia (YSZ) was performed by a femtosecond pulsed laser to investigate the feasibility of V-shaped groove microstructure fabrication. Firstly, fundamental characteristics of microgroove fabrication was investigated by varying scanning speed of laser and number of scans. Higher scanning speed resulted in a smooth surface without any debris adhesion. By increasing number of scans, the cross-sectional profile of the microgroove became a well-defined V shape, and the taper angle of the V-shaped groove can be precisely controlled by laser scanning speed. Moreover, the laser-induced phase transformation of YSZ was characterized, and it was found that the monoclinic ratio after irradiation decreased in comparison with original YSZ surface, indicating improved strength and toughness. TEM cross-sectional observation of the microgrooves was performed and tetragonal phase was detected independent of locations. Finally, micro pyramid structures were created on the YSZ surface by perpendicularly crossing the laser scan directions. The resulting surface showed a drastic change in surface wettability. These findings demonstrated the possibility of generating precise complex microstructures on YSZ surface with high functionality and low subsurface damage, presenting great potential of wide applications in industry.

飞秒脉冲激光辐照氧化钇稳定的氧化锆（YSZ），以研究V形凹槽微结构制造的可行性。首先，通过改变激光的扫描速度和扫描次数来研究微槽加工的基本特性。较高的扫描速度导致表面光滑，没有任何碎屑粘附。通过增加扫描次数，微槽的横截面轮廓成为清晰的V形，并且可以通过激光扫描速度精确控制V形凹槽的锥角。此外，表征了YSZ的激光诱导相变，发现与原始YSZ表面相比，辐照后的单斜率降低，表明强度和韧性得到改善。对微槽进行TEM横截面观察，并检测四方相，而与位置无关。最后，通过垂直交叉激光扫描方向，在YSZ表面上创建了微型金字塔结构。所得表面显示出表面润湿性的急剧变化。这些发现证明了在YSZ表面上生成具有高功能性和低次表面损伤的精密复杂微结构的可能性，为工业上的广泛应用提供了巨大的潜力。