Abstract

The results of a study of the oscillations of microcantilevers (MCs) made of nanoporous anodic aluminum oxide and constituting the base of biochemical sensors are described. Finite-element modeling of an MC’s vibrations reveal the sources of resonances in the frequency spectrum that do not correspond to the cantilever’s oscillations and complicate the development of sensors. It is shown for the first time that such sources are resonances of vibrations of the base of the MC on the elastic layer of the compound used to attach the base to the substrate. Approximate relationships between the parameters of the MC, base, and compound layer are obtained, which ensure that only the working modes of MC vibrations are present in the spectrum. To ensure a clean spectrum, one of two conditions must be observed or a combination of both: a sufficiently rigid MC attachment to the substrate and a sufficiently small base size. Ensuring a clean spectrum is achieved regardless of the rigidity of the MC’s fastening as long as the base length does not exceed 0.6, 0.43, and 0.33 MC lengths, respectively, for the 3rd, 4th, and 5th harmonics of the MC’s working mode.

中文翻译：

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用于生化传感器的阳极氧化铝纳米多孔微悬臂的振动建模

摘要

描述了由纳米多孔阳极氧化铝制成并构成生化传感器基础的微悬臂梁（MC）振荡的研究结果。MC振动的有限元建模揭示了频谱中的共振源，这些共振源不与悬臂的振动相对应，并且使传感器的开发变得复杂。首次表明，此类源是MC底座在用于将底座附着到基板的化合物的弹性层上的振动共振。获得了MC，基础层和复合层的参数之间的近似关系，这确保了光谱中仅存在MC振动的工作模式。为了确保频谱干净，必须遵守以下两种情况之一或两者结合：足够刚性的MC附着在基板上，以及足够小的底座尺寸。只要MC工作模式的三次谐波，三次谐波和第五次谐波的基本长度分别不超过0.6、0.43和0.33 MC长度，无论MC紧固件的刚性如何，都能确保获得清晰的频谱。