In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al₂O₃ for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al₂O₃ from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked A1₂O₃ and FAGPTi shows excellent barrier film performance as low as 6.33 × 10⁻⁵g m⁻² day⁻¹s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization.

在这项研究中，我们介绍了一种名为FAGPTi的基于溶胶-凝胶的氟化纳米杂化材料，以制造基于等离子体的原子层沉积（PEALD）的Al ₂ O _3的有机-无机混合薄膜封装（TFE），用于光电技术。对各种基材上的FAGPTi膜的系统分析表明，FAGPTi膜完全覆盖了基材的所有部分，显示出低粗糙度，高疏水性和良好的柔韧性。这些结果表明，FAGPTi能够保护水腐蚀的Al ₂ O ₃免受水分或水的外部侵入。因此，TFE具有交替堆叠的A1 ₂ O ₃FAGPTi在加速条件下（60°C和90％RH）显示了出色的阻隔膜性能，低至6.33×10 ^-5 g m ^-2天^-1 s，四对中的可见光透射率均高于95％。特别是，FAGPTi膜显示出先进的侧面不渗透性，其值可与氧化物层的值相媲美。因此，我们希望我们与FAGPTi层的系统合作能够提供对阻挡膜的深入了解，从而促进其在柔性光电器件中的集成，从而加速其商业化进程。