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Advanced Side-Impermeability Characteristics of Fluorinated Organic-Inorganic Nanohybrid Materials for Thin Film Encapsulation

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Abstract

In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al2O3 for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al2O3 from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al2O3 and FAGPTi shows excellent barrier film performance as low as 6.33 × 10−5g m−2 day−1s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization.

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Acknowledgments

This work was supported by the Materials & Components Technology Development Program (20006537, Development of High-Performance Insulation Materials for Flexible OLED Display TFT) and “Human Resources Program in Energy Technology” of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) (No. 20204010600100) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea) for SHK. This work was supported by the 2020 Research Fund of the University of Seoul for Hong Chul Moon.

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  1. These authors were equally contributed to this work.

Authors and Affiliations

  1. Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Korea

    Hyeok-jin Kwon, Jisu Hong & Chan Eon Park

  2. Department of Advanced Materials Engineering, Kangwon National University, Samcheok, 25931, Republic of Korea

    Hong Nhung Le & Juyoung Kim

  3. School of Chemical Engineering, Yeungnam University, Gyeongsan, 38541, Korea

    Cheolmin Jung & Se Hyun Kim

  4. Department of Chemical Engineering, University of Seoul, Seoul, 02504, Korea

    Hong Chul Moon

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  1. Hyeok-jin Kwon
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  2. Jisu Hong
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  4. Cheolmin Jung
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  5. Chan Eon Park
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  6. Hong Chul Moon
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Correspondence to Hong Chul Moon, Juyoung Kim or Se Hyun Kim.

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The image from this article is used as the cover image of the Volume 29, Issue 4.

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Information is available regarding the chemcal structure of AFAP, contact angle and surface energy, XPS data, stretchable characteristics, transmittance and TGA data of hybrid materials. The materials are available via the Internet at http://www.springer.com/13233.

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Kwon, Hj., Hong, J., Le, H.N. et al. Advanced Side-Impermeability Characteristics of Fluorinated Organic-Inorganic Nanohybrid Materials for Thin Film Encapsulation. Macromol. Res. 29, 313–320 (2021). https://doi.org/10.1007/s13233-021-9035-2

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