This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A $10\mathrm{\mu }\mathrm{m}$ range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.

本文介绍了一种由平面内弯曲致动器构造的整体式纳米定位器，该弯曲致动器比先前报道的延伸致动器具有更大的挠度，但会牺牲刚度和共振频率。通过构造具有串行运动学设计的XY纳米定位平台，对所提出的执行器进行了演示。分析建模和有限元分析可准确预测纳米定位器的实验性能。一个$10\mathrm{\mu }\mathrm{米}$在X和Y轴上施加+/- 200 V的电压可达到最大范围。第一共振模式在Z轴上以250 Hz出现。该阶段用于原子力显微镜成像。