Abstract

The effect of the porosity of a silicon layer containing macropores on the elastic and thermomechanical properties of SiC/Si substrates obtained by the atomic substitution method has been studied. The calculation of the elastic constants of porous silicon is performed by the finite element method. The results of calculating of Young’s modulus in the [111] direction agree with the estimates obtained by the method of nanoindentation of SiC/Si (111) substrates. The derived theoretical model can be used to determine the elastic properties of SiC/Si substrates of various orientations.

中文翻译：

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硅层孔隙率对混合SiC / Si衬底弹性性能的影响

摘要

研究了包含大孔的硅层的孔隙率对通过原子取代法获得的SiC / Si基板的弹性和热机械性能的影响。多孔硅的弹性常数的计算是通过有限元法进行的。[111]方向的杨氏模量的计算结果与通过SiC / Si（111）基板的纳米压痕法得到的推定值一致。导出的理论模型可用于确定各种方向的SiC / Si基板的弹性性能。