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The Influence of the Porosity of Silicon Layer on the Elastic Properties of Hybrid SiC/Si Substrates

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Abstract

The effect of the porosity of a silicon layer containing macropores on the elastic and thermomechanical properties of SiC/Si substrates obtained by the atomic substitution method has been studied. The calculation of the elastic constants of porous silicon is performed by the finite element method. The results of calculating of Young’s modulus in the [111] direction agree with the estimates obtained by the method of nanoindentation of SiC/Si (111) substrates. The derived theoretical model can be used to determine the elastic properties of SiC/Si substrates of various orientations.

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REFERENCES

  1. K. J. Chen, O. Häberlen, A. Lidow, C. Tsai, T. Ueda, Y. Uemoto, and Y. Wu, IEEE Trans. Electron Dev. 64, 779 (2017). https://doi.org/10.1109/TED.2017.2657579

    Article  ADS  Google Scholar 

  2. M. Yang, W. Wang, Y. Lin, W. Yang, and G. Li, Mater. Lett. 182, 277 (2016). https://doi.org/10.1016/j.matlet.2016.07.003

    Article  Google Scholar 

  3. S. A. Kukushkin and A. V. Osipov, J. Phys. D.: Appl. Phys. 47, 313001 (2014). https://doi.org/10.1088/0022-3727/47/31/313001

    Article  ADS  Google Scholar 

  4. A. S. Grashchenko, S. A. Kukushkin, and A. V. Osipov, Tech. Phys. Lett. 40, 1114 (2014). https://doi.org/10.1134/S1063785014120268

    Article  ADS  Google Scholar 

  5. S. A. Kukushkin and Sh. Sh. Sharofidinov, Phys. Solid State 61, 2342 (2019). https://doi.org/10.1134/S1063783419120254

    Article  ADS  Google Scholar 

  6. S. A. Kukushkin and A. V. Osipov, Tech. Phys. Lett. 46, 1103 (2020). https://doi.org/10.1134/S1063785020110243

    Article  ADS  Google Scholar 

  7. Handbook Series on Semiconductor Parameters, Ed. by M. Levinstein, S. Rumyantsev, and M. Shur (World Scientific, Singapore, 1996).

    Google Scholar 

  8. A. P. Roberts and E. J. Garboczi, J. Am. Ceram. Soc. 83, 3041 (2000). https://doi.org/10.1111/j.1151-2916.2000.tb01680.x

    Article  Google Scholar 

  9. L. Gao, C. Wang, Z. Liu, and Z. Zhuang, Chin. J. Aeronaut. 30, 1417 (2017). https://doi.org/10.1016/j.cja.2017.05.010

    Article  Google Scholar 

  10. L. B. Freund and S. Suresh, Thin Film Materials. Stress, Defect Formation and Surface Evolution (Cambridge Univ. Press, Cambridge, 2003).

    MATH  Google Scholar 

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Funding

This study was carried out within the framework of the Russian Science Foundation, project no. 20-12-00193.

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Authors and Affiliations

  1. St. Petersburg University of Information Technologies, Mechanics and Optics (ITMO University), 197101, St. Petersburg, Russia

    A. A. Koryakin

  2. Alferov National Research Academic University, Russian Academy of Sciences, 194021, St. Petersburg, Russia

    Yu. A. Eremeev

  3. Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences, 199178, St. Petersburg, Russia

    A. V. Osipov & S. A. Kukushkin

  4. Peter the Great St. Petersburg Polytechnic University, 195251, St. Petersburg, Russia

    S. A. Kukushkin

Authors
  1. A. A. Koryakin
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  2. Yu. A. Eremeev
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  3. A. V. Osipov
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  4. S. A. Kukushkin
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Corresponding author

Correspondence to S. A. Kukushkin.

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The authors declare that they have no conflict of interest.

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Translated by N. Petrov

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Koryakin, A.A., Eremeev, Y.A., Osipov, A.V. et al. The Influence of the Porosity of Silicon Layer on the Elastic Properties of Hybrid SiC/Si Substrates. Tech. Phys. Lett. 47, 126–129 (2021). https://doi.org/10.1134/S1063785021020085

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  • DOI: https://doi.org/10.1134/S1063785021020085

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