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Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets
International Journal of Precision Engineering and Manufacturing ( IF 2.6 ) Pub Date : 2021-03-05 , DOI: 10.1007/s12541-021-00495-0
Masayoshi Nakamura , Keijiro Nakasa , Yudai Kitamika , Sande Gao , Tsunetaka Sumomogi

Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel at 250 W for 10.8 ks, and fine column-shaped protrusions with diameters smaller than 500 nm were formed. In addition, plasma-nitriding was applied to the protrusions of type 420 steel using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. The gripping ability of protrusions was measured by friction tests for three types of fiber sheets. For a cotton cloth, the friction coefficients of the as-sputter-etched and plasma-nitrided type 420 steel specimens were 1.3 and 1.7 at a nominal compressive stress of 0.8 kPa, and that of the as-sputter-etched type 316 steel specimen was 1.0. These are much larger than 0.8 and 0.5 of the specimens polished with #100 emery paper and buff-polished with alumina powders. Also for microfiber and polyester fiber sheets, the specimen with protrusions showed a higher gripping ability than those of the mechanically polished specimens. The reason for the large gripping ability of protrusion specimens is due to piercing of the protrusions between and into weaving yarns.



中文翻译:

不锈钢溅射刻蚀形成细小凸起物和纤维板的抓地力评估

使用射频磁控溅射设备,以250 W的功率对AISI类型420不锈钢进行氩离子溅射蚀刻14.4 ks,以形成底部直径为10–20 µm的锥形突起。还以250W的功率对AISI型316不锈钢进行了10.8ks的溅射蚀刻,并且形成了直径小于500nm的细圆柱状突起。此外,使用0.53 Pa的氮气和0.67 Pa的氩气以50 W的功率混合1.8 ks,对420型钢的突起进行了等离子体氮化。通过摩擦测试对三种类型的纤维片测量突起的抓地能力。对于棉布,在标称压缩应力为0.8 kPa时,经溅射蚀刻和等离子氮化的420型钢试样的摩擦系数分别为1.3和1.7,溅射蚀刻后的316型钢试样为1.0。这些样品远远大于用#100砂纸抛光并用氧化铝粉末抛光的样品的0.8和0.5。同样对于微纤维和聚酯纤维片而言,具有凸起的样品比机械抛光的样品具有更高的抓地力。突起试样的大抓取能力的原因是由于突起在织造纱之间和之中刺穿。

更新日期:2021-03-05
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