Laser ablation of alumina ceramics was performed in the ambient air using a 193-nm ArF excimer laser. The effect of the laser parameters (pulse repetition frequency, laser spot diameter, fluence, and the number of laser pulses) on the ablation behavior was investigated. Scanning electron microscopy, optical microscopy, Raman spectroscopy, and energy-dispersive X-ray spectroscopy (EDS) were used to assess the crater morphology, ablation depth, and changes in the structure and chemical composition of the ablated material. There was no significant difference in the ablation rate between craters produced at a pulse repetition frequency of 10 and 100 Hz using a number of laser pulses up to 500. Increasing pulse repetition frequency to 300 Hz slightly reduced the ablation rate of the craters produced using > 150 laser pulses. The ablation rate was found to decrease from pulse to pulse at high fluence and was higher for small (25 µm) than for large (110 µm) laser spot diameters. The Raman and EDS spectra, collected at and near the ablated craters, were similar to those collected at pristine non-ablated areas, indicated no changes in the structure and chemical composition of alumina due to ablation. Ablation threshold fluence was calculated from the relationship between ablation rate and fluence for craters produced using 60 laser pulses and was found to be 1.35 J/cm².

使用193 nm ArF受激准分子激光器在环境空气中对氧化铝陶瓷进行激光烧蚀。研究了激光参数（脉冲重复频率，激光光斑直径，能量密度和激光脉冲数）对烧蚀行为的影响。扫描电子显微镜，光学显微镜，拉曼光谱和能量色散X射线光谱法（EDS）用于评估坑的形态，烧蚀深度以及烧蚀材料的结构和化学成分的变化。使用高达500个的激光脉冲，在10和100 Hz的脉冲重复频率下产生的弹坑之间的烧蚀率没有显着差异。将脉冲重复频率增加到300 Hz会稍微降低使用>产生的弹坑的烧蚀率。 150个激光脉冲。发现在高通量下，脉冲之间的烧蚀速率会降低，对于小直径（25 µm）的激光烧蚀速率要比大（110 µm）激光光斑的直径更高。在烧蚀的弹坑处及其附近收集的拉曼光谱和EDS光谱与在原始非烧蚀区域收集的拉曼光谱和EDS光谱相似，表明由于烧蚀，氧化铝的结构和化学组成没有变化。根据烧蚀速率与使用60个激光脉冲产生的弹坑的注量之间的关系，计算出烧蚀阈值注量，发现其为1.35 J / cm 表明烧蚀没有改变氧化铝的结构和化学组成。根据烧蚀速率与使用60个激光脉冲产生的弹坑的注量之间的关系，计算出烧蚀阈值注量，发现其为1.35 J / cm 表明烧蚀没有改变氧化铝的结构和化学组成。根据烧蚀速率与使用60个激光脉冲产生的弹坑的注量之间的关系，计算出烧蚀阈值注量，发现其为1.35 J / cm²。