Abstract In the last decade, novel approaches for post-synthesis processes of separation and high purification of gases are gaining larger acceptance in industry. The market is competing with consolidated operations such as cryogenic distillation. The key for new approaches of distillation, membranes and crystallization in challenging and harsh environments is the development of new tough, high-performance materials that are characterized by higher energy efficiency compared with conventional cryogenic distillation. This review highlights the most promising fields of research in high purification and separation of gases by considering the elevated pressure and thermal distillations, membrane cascades, purification in synthesis by use of catalytic technologies, crystallization and hydride methods based on them.

中文翻译：

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半导体行业高纯物质生产进展与展望

摘要 在过去的十年中，气体分离和高纯度合成后工艺的新方法在工业中得到了越来越多的认可。市场正在与低温蒸馏等综合业务竞争。在具有挑战性和恶劣的环境中采用新的蒸馏、膜和结晶方法的关键是开发新的坚韧、高性能的材料，与传统的低温蒸馏相比，这些材料的特点是能效更高。本综述通过考虑高压和热蒸馏、膜级联、使用催化技术的合成纯化、基于它们的结晶和氢化方法，突出了气体高纯度和分离的最有前途的研究领域。