We present a simple, low-cost and effective method to monitor mode-shapes of dynamic structures, based on laser triangulation. Through the smart adjustment of the camera view angle, we were able to acquire the mode-shapes on two orthogonal planes, without the need to change the placement of neither the device-under-test, nor the illumination or detection optics. The presented technique was demonstrated on two different miniaturized dynamic structures for laser-scanned optical imaging both having ~ 1 cm² floor area; a 3D-printed electromagnetically-actuated laser scanner, and an orthogonally placed double piezoelectric cantilever structure for fiber scanning. Experimental findings reveal a good match with the observations made on finite-element simulations. Based on its cost advantage (only requiring 1–2 laser, a cylindrical lens, and a standard CMOS camera) and simplicity (both setup and software), the presented method is particularly appealing to characterize MEMS and similar dynamic structures on multiple planes, performing periodic motion. Moreover, the method is scalable to smaller structures having ~ 1 mm² floor area, and higher modal frequencies.

我们提出了一种简单，低成本和有效的方法，基于激光三角测量来监视动态结构的模式形状。通过智能地调​​整摄像机的视角，我们能够在两个正交平面上获取模式形状，而无需更改被测设备，照明或检测光学器件的位置。所展示的技术在两种不同的微型动态结构上得到了证明，这两种结构均具有〜1 cm ^2的激光扫描光学成像建筑面积; 3D打印的电磁激励激光扫描仪，以及用于光纤扫描的正交放置的双压电悬臂结构。实验结果表明与有限元模拟的观察结果非常吻合。基于其成本优势（仅需要1-2激光，圆柱透镜和标准CMOS摄像头）和简便性（包括设置和软件），该方法特别吸引人，可以表征MEMS和多平面上的类似动态结构，周期性运动。而且，该方法可扩展到具有〜1mm ^2的地面面积和较高模态频率的较小结构。