Abstract
We present a simple, low-cost and effective method to monitor mode-shapes of dynamic structures, based on laser triangulation. Through the smart adjustment of the camera view angle, we were able to acquire the mode-shapes on two orthogonal planes, without the need to change the placement of neither the device-under-test, nor the illumination or detection optics. The presented technique was demonstrated on two different miniaturized dynamic structures for laser-scanned optical imaging both having ~ 1 cm2 floor area; a 3D-printed electromagnetically-actuated laser scanner, and an orthogonally placed double piezoelectric cantilever structure for fiber scanning. Experimental findings reveal a good match with the observations made on finite-element simulations. Based on its cost advantage (only requiring 1–2 laser, a cylindrical lens, and a standard CMOS camera) and simplicity (both setup and software), the presented method is particularly appealing to characterize MEMS and similar dynamic structures on multiple planes, performing periodic motion. Moreover, the method is scalable to smaller structures having ~ 1 mm2 floor area, and higher modal frequencies.
Similar content being viewed by others
References
Burns DJ, Helbig HF (1999) System for automatic electrical and optical characterization of microelectromechanical devices. J Microelectromech Syst 8:473–482. https://doi.org/10.1109/84.809063
Guo T, Chang H, Chen J, Fu X, Hu X (2009) Micro-motion analyzer used for dynamic MEMS characterization. Opt Lasers Eng 47:512–517. https://doi.org/10.1016/j.optlaseng.2008.09.006
Hart MR, Conant RA, Lau KY, Muller RS (2000) Stroboscopic interferometer system for dynamic MEMS characterization. J Microelectromech Syst 9:409–418. https://doi.org/10.1109/84.896761
Khayatzadeh R, Çivitci F, Ferhanoğlu O (2017) Optimization of piezo-fiber scanning architecture for low voltage/high displacement operation. Sens Actuators A Phys 255:21–27
Lee CM, Engelbrecht CJ, Soper TD, Helmchen F, Seibel EJ (2010) Scanning fiber endoscopy with highly flexible, 1 mm catheterscopes for wide-field, full-color imaging. J Biophoton 3:385–407. https://doi.org/10.1002/jbio.200900087
Mavadia J, Xi J, Chen Y, Li X (2012) An all-fiber-optic endoscopy platform for simultaneous OCT and fluorescence imaging. Biomed Opt Express 3:2851. https://doi.org/10.1364/boe.3.002851
Ozdoganlar OB, Hansche BD, Carne TG (2005) Experimental modal analysis for microelectromechanical systems. Exp Mech 45:498–506. https://doi.org/10.1177/0014485105059991
Rembe C, Kant R et al (2001) Optical measurement methods to study dynamic behavior in MEMS (Proceedings Paper), Spie.Org. 4400, pp 127–137. http://spie.org/x648.html?product_id=445595%5Cnpapers://7b6bd94c-a483-4e3f-bd34-13485f8e2f2e27/Paper/p1429
Rivera DR, Brown CM, Ouzounov DG, Pavlova I, Kobat D, Webb WW, Xu C (2011) Compact and flexible raster scanning multiphoton endoscope capable of imaging unstained tissue. PNAS 108:17598–17603. https://doi.org/10.1073/pnas.1114746108
Savas J, Khayatzadeh R, Civitci F, Gokdel YD, Ferhanoglu O (2018) Towards fully 3D-printed miniaturized confocal imager. Opt Eng 57:41402
Serio B, Hunsinger J-J, Cretin B (2004) Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations. Opt Micro-Nanometrol Manuf Technol 10(1117/12):545586
Stratasys, PolyJet Materials Data Sheet, (n.d.). http://usglobalimages.stratasys.com/
Acknowledgements
Authors would like to thank Prof. Tayfun Akgül for useful discussions. This work was funded in part by Istanbul Technical University Internal Research Funds (ITU-BAP MGA-2018-41682).
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations
Rights and permissions
About this article
Cite this article
Erdem, Y.E., Yelten, M.B. & Ferhanoğlu, O. Monitoring modal shape of miniaturized dynamic structures via laser triangulation and stroboscopy. Microsyst Technol 27, 3751–3756 (2021). https://doi.org/10.1007/s00542-020-05159-z
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-020-05159-z