We demonstrate a new technique for filling mm-scale microfabricated silicon and glass cavities with alkali vapors at the wafer-scale. A single etched silicon wafer contains an array of cavities containing alkali precursor materials offset laterally from the cell array. The wafer is heated to create an array of alkali droplets on an upper glass wafer, which is then translated laterally under vacuum and bonded to create the cells. This technique can be implemented in a commercially available bonding tool, allows the fabrication of cells with arbitrary buffer gas contents and pressures and can potentially produce cells with dimensions below 100 m.

中文翻译：

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使用原位原子沉积法在晶圆级制造碱性蒸气电池

我们演示了一种新技术，该技术可以在晶圆级用碱蒸汽填充毫米级的微型硅和玻璃腔体。单个蚀刻的硅晶片包含一个空腔阵列，该空腔包含从电池阵列横向偏移的碱性前体材料。加热晶片以在上玻璃晶片上形成一系列碱滴，然后在真空下将其横向平移并结合以形成电池。该技术可以在市售的粘合工具中实施，允许制造具有任意缓冲气体含量和压力的电池，并有可能生产尺寸小于100的电池 米