Abstract—

This paper presents results on control over the surface composition, surface structure, and pore texture of core/shell materials, as exemplified by the growth of conformal titanium oxide nanocoatings on γ‑Аl₂О₃ by atomic layer deposition via sequential and alternating exposure of the alumina to TiCl₄ and H₂O vapor. The alumina surface and growing titanium oxide layer are shown to influence the characteristics of the forming two-phase material. Increasing the amount of titanium via an increase in the number of deposition cycles leads to a systematic decrease in specific surface area, pore volume, and pore size, which points to conformal pore filling in the starting matrix by a titanium oxide layer. The composition and structure of the titanium oxide coating are influenced by its thickness and the nature of the starting matrix. The coordination state of the titanium oxide in monolayer structures is characteristic of the titanium oxide polyhedra in aluminum titanate. As the distance from the top monolayer to the surface of the matrix (coating thickness) increases, an X-ray amorphous layer is formed in which the oxygen coordination environment of the titanium is similar to that in an anatase-like phase of titanium dioxide.

中文翻译：

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原子层沉积法在γ-Аl2О3上生长氧化钛纳米结构

摘要-

本文介绍了关于在表面构图控制中，表面结构，和核/壳材料的孔隙结构的结果，通过共形的氧化钛纳米涂层的上生长γ-Аl例证₂ О ₃通过原子层沉积通过的顺序和交替暴露氧化铝制取TiCl ₄和H ₂O蒸气。示出了氧化铝表面和生长的氧化钛层影响形成的两相材料的特性。通过增加沉积循环数来增加钛的量导致比表面积，孔体积和孔尺寸的系统性减小，这表明氧化钛层将保形的孔填充在起始基质中。氧化钛涂层的组成和结构受其厚度和起始基体性质的影响。单层结构中氧化钛的配位态是钛酸铝中氧化钛多面体的特征。随着从顶部单层到基质表面的距离（涂层厚度）的增加，