Abstract A method of gas-phase deposition of diamond structures with the use of high-velocity jets for transporting gases activated in a microwave plasma to the substrate is developed. The diamond structures are synthesized from a hydrogen–methane mixture with the methane concentration of 1%. The influence of the gas mixture flow rate on the synthesis of the diamond structures with an unchanged composition of the mixture, pressure in the deposition chamber, and substrate temperature is studied. It is found that an increase in the flow rate leads to an increase in the polycrystalline film density and in the size of the diamond crystals forming the film. The composition of the mixture at the discharge chamber exit is numerically analyzed for different flow rates of the gas mixture. A correlation of the mixture composition with the growth rate and quality of the diamond structures is demonstrated.

中文翻译：

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气体混合物流速对高速微波等离子体金刚石合成过程的影响

摘要 开发了一种气相沉积金刚石结构的方法，该方法使用高速射流将在微波等离子体中激活的气体传输到基底。金刚石结构由甲烷浓度为 1% 的氢-甲烷混合物合成。研究了气体混合物流速对金刚石结构合成的影响，其中混合物的组成、沉积室中的压力和衬底温度保持不变。发现流速的增加导致多晶膜密度和形成膜的金刚石晶体尺寸的增加。对放电室出口处的混合物成分进行数值分析，以了解气体混合物的不同流速。