Skip to main content
SpringerLink
Log in

EFFECT OF THE GAS MIXTURE FLOW RATE ON THE PROCESS OF DIAMOND SYNTHESIS FROM A HIGH-VELOCITY MICROWAVE PLASMA

  • Published:
Journal of Applied Mechanics and Technical Physics Aims and scope

Abstract

A method of gas-phase deposition of diamond structures with the use of high-velocity jets for transporting gases activated in a microwave plasma to the substrate is developed. The diamond structures are synthesized from a hydrogen–methane mixture with the methane concentration of 1%. The influence of the gas mixture flow rate on the synthesis of the diamond structures with an unchanged composition of the mixture, pressure in the deposition chamber, and substrate temperature is studied. It is found that an increase in the flow rate leads to an increase in the polycrystalline film density and in the size of the diamond crystals forming the film. The composition of the mixture at the discharge chamber exit is numerically analyzed for different flow rates of the gas mixture. A correlation of the mixture composition with the growth rate and quality of the diamond structures is demonstrated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

REFERENCES

  1. R. S. Balmer, J. R. Brandon, S. L. Clewes, et al., “Chemical Vapour Deposition Synthetic Diamond: Materials, Technology and Applications," J. Phys.: Cond. Matter. 21 (36), 364221 (2009).

  2. P. W. May, “Diamond Thin Films: A 21st-Century Material," Philos. Trans. Roy. Soc. London, Ser. A 358, 473–495 (2000).

  3. K. F. Sergeichev, “Diamond CVD Coatings for Cutting Tools (Review)," Usp. Prikl. Fiz. 3 (4), 342–376 (2015).

  4. R. A. Khmelnitskii, “Prospects of Growing of Large-Size Single-Crystal Diamond," Usp. Fiz. Nauk 185 (2), 143–159 (2015).

  5. A. K. Rebrov, M. V. Isupov, A. Yu. Litvintsev, and V. F. Burov, “Synthesis of Diamonds from the Microwave Plasma with the Use of Supersonic Gas Flows," Prikl. Mekh. Tekh. Fiz. 59(5), 5–12 (2018) [J. Appl. Mech. Tech. Phys. 59 (5), 771–777 (2018)].

  6. A. K. Rebrov, M. S. Bobrov, A. A. Emelyanov, et al., “Experience in the Synthesis of Diamond from a Supersonic Microwave Plasma Jet," Interfac. Phenom. Heat Transfer 7 (2), 131–137 (2019).

  7. A. A. Emelyanov, A. K. Rebrov, and I. B. Yudin, “Deposition of Diamond Structures from Interacting Gas Jets," Zh. Tekh. Fiz.86 (12), 56–59 (2016).

  8. A. K. Rebrov, A. A. Emelyanov, M. Yu. Plotnikov, and I. B. Yudin, “Synthesis of Diamond Structures from the Jet of the H2 + CH4 Mixture in a Cocurrent Axisymmetric Hydrogen Flow," Prikl. Mekh. Tekh. Fiz. 58 (5), 142–150 (2017) [J. Appl. Mech. Tech. Phys. 58 (5), 881–888 (2017)].

  9. A. K. Rebrov, M. Yu. Plotnikov, Yu. Mankelevich, and I. B. Yudin, “Analysis of Flows by Deposition of Diamond-Like Structures," Phys. Fluids 30, 16106 (2018).

  10. A. K. Rebrov, A. A. Emelyanov, M. Yu. Plotnikov, et al., “Diamond Synthesis from a High-Velocity Flow of the Microwave Plasma," Dokl. Akad. Nauk, Tekh. Nauki 490 (1), 48–51 (2020).

  11. M. Yu. Hrebtov and M. S. Bobrov, “Numerical Optimization of Hydrogen Microwave Plasma Reactor for Diamond Film Deposition," J. Phys: Conf. Ser. 1359, 012010 (2019).

  12. M. S. Bobrov, M. Yu. Hrebtov, and A. K. Rebrov, “Numerical Simulation of the Activation Process of Supersonic Gas Flows by a Microwave Discharge," in Proc. of the 17th Int. Conf. on Microwave and High Frequency Heating, AMPERE 2019, Valencia (Spain), Sept. 9–12, 2019 (Am. Soc. Precision Eng., 2019), pp. 67–71.

  13. A. K. Rebrov, N. I. Timoshenko, A. A. Emelyanov, and I. B. Yudin, “Influence of the Substrate Temperature on the Jet Diamond Deposition," J. Phys: Conf. Ser. 1359, 012109 (2019).

  14. F. Silva, K. Hassouni, X. Bonnin, and A. Gicquel, “Microwave Engineering of Plasma-Assisted CVD Reactors for Diamond Deposition," J. Phys.: Cond. Matter. 21, 364202 (2009).

  15. D. G. Goodwin, R. L. Speth, H. K. Moffat, and B. W. Weber, “Cantera: An Object-Oriented Software Toolkit for Chemical Kinetics, Thermodynamics, and Transport Processes, Version 2.4.0 (2018); https://www.cantera.org;  DOI: 10.5281/zenodo.1174508.

  16. A. K. Rebrov, “Capabilities of Gas-Phase Synthesis of Diamond Structures," Usp. Fiz. Nauk 187 (2), 193–200 (2017).

Download references

Author information

Authors and Affiliations

  1. Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    A. K. Rebrov, A. A. Emelyanov, M. Yu. Plotnikov, N. I. Timoshenko, V. V. Terekhov & I. B. Yudin

Authors
  1. A. K. Rebrov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Emelyanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Yu. Plotnikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. N. I. Timoshenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. V. Terekhov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. I. B. Yudin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Yu. Plotnikov.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Rebrov, A.K., Emelyanov, A.A., Plotnikov, M.Y. et al. EFFECT OF THE GAS MIXTURE FLOW RATE ON THE PROCESS OF DIAMOND SYNTHESIS FROM A HIGH-VELOCITY MICROWAVE PLASMA. J Appl Mech Tech Phy 61, 819–827 (2020). https://doi.org/10.1134/S002189442005017X

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S002189442005017X

Keywords

Search

Navigation