In the present work, we report the deposition of vanadium pentoxide (V2O5) thin film on the quartz crystal microbalance (QCM) using vacuum thermal evaporation method followed by rapid thermal annealing (RTA) in oxygen atmosphere (O2),for gas sensing application. The structure, morphology and surface wettability of the obtained thin film were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and contact angle measurement (CA). The results show that the elaborated structure has a porous, rough and hydrophilic characteristic with a pure V2O5 phase in form of nanopaltelets. The sensing properties of V2O5 nanopaltelets /QCM structure were evaluated towards NH3 vapor at room temperature. The result revealed that the sensor exhibited good sensing performance: a fast response time, a short recovery time, good stability, reproducibility, reversibility and linearity.

中文翻译：

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基于V2O5纳米片/石英晶体微天平的室温氨气传感器

在目前的工作中，我们报告了使用真空热蒸发方法在氧气气氛 (O2) 中快速热退火 (RTA) 在石英晶体微天平 (QCM) 上沉积五氧化二钒 (V2O5) 薄膜，用于气体传感应用。通过X射线衍射（XRD）、扫描电子显微镜（SEM）、原子力显微镜（AFM）和接触角测量（CA）对所得薄膜的结构、形貌和表面润湿性进行了表征。结果表明，精心制作的结构具有多孔、粗糙和亲水的特性，具有纳米板形式的纯 V2O5 相。在室温下对 NH3 蒸汽评估了 V2O5 纳米托盘 /QCM 结构的传感特性。结果表明，该传感器表现出良好的传感性能：响应时间快，