Thermal annealing and effective surface passivation are significant to achieve high conversion efficiency (η) of passivated emitter and rear cells (PERC). Thus, we added an annealing process before front and rear surface passivation in the existing production line. We found that the front recombination current (J_0,f) and the rear recombination current (J_0,r) of annealed PERCs are both lower than baseline PERCs without annealing process, which means better defect repair and passivation effect were achieved. And the average η of annealed PERCs reaches 21.79%, which is 0.23% absolutely higher than that of the baseline PERCs. After that, we further explored the influence of gas composition (0%, 5% and 10% oxygen concentration in nitrogen atmosphere) during annealing process. We found that as the oxygen concentration increases, J_0,fs and J_0,rs of annealed PERCs (0%, 5%, 10%) are all lower than those of baseline PERCs. Meanwhile, the annealed PERCs (0%, 5%, 10%) get the average η of 21.77%, 21.82% and 21.84% respectively, possessing absolute efficiency increase over the baseline PERCs with the average η of 21.67%. The present work could help enhance the understanding of passivation property and improve the performance of industrial PERC cells.

热退火和有效的表面钝化对于实现钝化的发射极和后电池（PERC）的高转换效率（η）至关重要。因此，我们在现有生产线的正面和背面钝化之前添加了退火工艺。我们发现前复合电流（J _0，f）和后复合电流（J _0，r）的退火PERC均低于未进行退火工艺的基线PERC，这意味着可以实现更好的缺陷修复和钝化效果。退火PERC的平均η达到21.79％，绝对高于基线PERC的0.23％。之后，我们进一步探索了退火过程中气体组成（氮气氛中氧气浓度为0％，5％和10％）的影响。我们发现，随着氧气浓度的增加，退火PERC（0％，5％，10％）的J _0，f s和J _0，r s均低于基线PERC。同时，退火的PERC（0％，5％，10％）得到平均η分别具有21.77％，21.82％和21.84％的效率，相对于基准PERC具有绝对效率的提高，平均η为21.67％。目前的工作可能有助于增进对钝化性能的理解，并改善工业PERC电池的性能。