Abstract

Methods for high-precision processing of surface of optical elements using beams of accelerated ions are considered. Characteristics and parameters of the equipment and problems that can be solved are presented. It is shown that final correction of local shape errors is possible with the aid of small-size ion beam and axisymmetric correction/aspherization is possible using wide-aperture ion beam and ion polishing. Effective roughnesses of the surfaces of fused silica, sitall, Zerodur, and ULE® are obtained at spatial frequencies of q ∈ [2.5 × 10^—2–6.0 × 10¹ μm^–1]. Examples of aspheric surfaces and aspherization profile are presented.

中文翻译：

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离子束方法用于光学表面的高精度加工

摘要

考虑了使用加速离子束对光学元件表面进行高精度加工的方法。介绍了设备的特性和参数以及可以解决的问题。结果表明，借助于小尺寸的离子束可以对局部形状误差进行最终校正，而使用大孔径离子束和离子抛光可以进行轴对称校正/球化。熔融二氧化硅，sitall的表面的粗糙度有效，微晶玻璃，和ULE®在的空间频率得到q [2∈ 。5×10 ^—2 – 6 。0×10 ¹微米^-1 ]。给出了非球面和非球面轮廓的示例。