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Ion-Beam Methods for High-Precision Processing of Optical Surfaces

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Abstract

Methods for high-precision processing of surface of optical elements using beams of accelerated ions are considered. Characteristics and parameters of the equipment and problems that can be solved are presented. It is shown that final correction of local shape errors is possible with the aid of small-size ion beam and axisymmetric correction/aspherization is possible using wide-aperture ion beam and ion polishing. Effective roughnesses of the surfaces of fused silica, sitall, Zerodur, and ULE® are obtained at spatial frequencies of q ∈ [2.5 × 10—2–6.0 × 101 μm–1]. Examples of aspheric surfaces and aspherization profile are presented.

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Funding

This work was carried out using the equipment of the Center for Collective Use of the IPM RAS, with the support of the Ministry of Education and Science of the Russian Federation within the framework of Agreement no. 075-02-2018-182 (RFMEFI60418X0202).

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 607680, Nizhny Novgorod, Russia

    I. G. Zabrodin, M. V. Zorina, I. A. Kas’kov, I. V. Malyshev, M. S. Mikhailenko, A. E. Pestov, N. N. Salashchenko, A. K. Chernyshev & N. I. Chkhalo

Authors
  1. I. G. Zabrodin
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  2. M. V. Zorina
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  3. I. A. Kas’kov
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  4. I. V. Malyshev
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  5. M. S. Mikhailenko
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  6. A. E. Pestov
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  7. N. N. Salashchenko
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  8. A. K. Chernyshev
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  9. N. I. Chkhalo
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Correspondence to A. E. Pestov.

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The authors declare that there is no conflicts of interest.

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Translated by A. Chikishev

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Zabrodin, I.G., Zorina, M.V., Kas’kov, I.A. et al. Ion-Beam Methods for High-Precision Processing of Optical Surfaces. Tech. Phys. 65, 1837–1845 (2020). https://doi.org/10.1134/S1063784220110274

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  • DOI: https://doi.org/10.1134/S1063784220110274

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