Abstract

In this paper, we propose a method for optimizing the design and composition of the anode membrane with a transmission-type target as part of a system of soft X-ray sources based on field-emission triodes for performing tasks in the field of X-ray nanolithography. It allows to prevent the degradation of the operating characteristics of the system when significant electrostatic deformation of the anode occurs under the influence of a control electric field in the inter-electrode space of the triodes. For this purpose, the inclusion of an additional control electrode in the system design is considered, which makes it possible to compensate for the deformation of the anode membrane to an acceptable level and thereby stabilize the operation of X-ray sources. A numerical model of the electrostatic deflection of the anode assembly in a modified design is developed, based on which the optimal composition and geometric parameters of the anode membrane with a compensating electrode are determined. In particular, the optimal distance between the anode membrane in the initial (undeformed) state and the compensating electrode was found (equal to 5 μm), at which a minimum voltage difference (about 1.15 kV) should be applied to these electrodes to prevent critical deflection of the membrane (0.72 μm with a membrane radius of 750 µm). It is also shown that, due to their extremely high hardness (>80 GPa), diamond-like films are the most promising material for the anode electrode. The results obtained can also be useful for the development of miniature X-ray generation devices for various applications.

中文翻译：

---

用于X射线纳米光刻的软X射线源系统中具有透射型靶的阳极膜的优化

摘要

在本文中，我们提出了一种基于场发射三极管的软X射线源系统的一部分，用于优化带有透射型靶的阳极膜的设计和组成，该方法基于场发射三极管在X-射线领域执行任务射线纳米光刻。当在三极管的电极间空间中的控制电场的作用下，阳极发生明显的静电变形时，它可以防止系统的工作特性降低。为此，考虑在系统设计中包括一个附加的控制电极，这使得可以将阳极膜的变形补偿到可接受的水平，从而稳定X射线源的运行。建立了改进设计中的阳极组件静电偏转的数值模型，在此模型的基础上，确定了带有补偿电极的阳极膜的最佳成分和几何参数。特别是，找到了处于初始（未变形）状态的阳极膜与补偿电极之间的最佳距离（等于5μm），应在这些电极上施加最小电压差（约1.15 kV），以防止出现临界电压。膜的挠度（膜半径为750μm的0.72μm）。还显示出，由于其极高的硬度（> 80 GPa），类金刚石薄膜是阳极电极最有希望的材料。获得的结果对于开发用于各种应用的微型X射线生成设备也可能有用。