Abstract

The problem of efficiency of using electrical properties for characterizing graphene structures obtained by chemical vapor deposition and formed on substrates of various materials (copper foil, glass, silicon, and Al₂O₃) is investigated. This study demonstrates the high sensitivity of the Kelvin-probe method as well as the methods of scanning capacitance and electrostatic microscopy to the number of graphene layers on the surface of substrates made of various materials.

中文翻译：

---

CVD合成石墨烯薄膜的扫描探针显微镜质量表征

摘要

研究了利用电学性质表征通过化学气相沉积获得并形成在各种材料（铜箔，玻璃，硅和Al ₂ O ₃）的基板上的石墨烯结构的效率问题。这项研究证明了开尔文探针法以及扫描电容和静电显微镜法对由各种材料制成的基板表面上石墨烯层数的高灵敏度。