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Quality Characterization of CVD-Synthesized Graphene Films by Scanning Probe Microscopy

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Abstract

The problem of efficiency of using electrical properties for characterizing graphene structures obtained by chemical vapor deposition and formed on substrates of various materials (copper foil, glass, silicon, and Al2O3) is investigated. This study demonstrates the high sensitivity of the Kelvin-probe method as well as the methods of scanning capacitance and electrostatic microscopy to the number of graphene layers on the surface of substrates made of various materials.

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Funding

This study was carried out within the framework of the theme “Function,” project no. AAAA-A19-119012990095-0. The analysis of potential distributions was supported by the Russian Science Foundation, grant no. 17-12-01002P.

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Authors and Affiliations

  1. Mikheev Institute of Metal Physics, Ural Branch, Russian Academy of Sciences, 620219, Yekaterinburg, Russia

    A. B. Rinkevich, Yu. V. Korkh, A. S. Klepikova & E. A. Tolmacheva

Authors
  1. A. B. Rinkevich
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  2. Yu. V. Korkh
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  3. A. S. Klepikova
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  4. E. A. Tolmacheva
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Corresponding authors

Correspondence to A. B. Rinkevich, Yu. V. Korkh, A. S. Klepikova or E. A. Tolmacheva.

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Translated by V. Bukhanov

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Rinkevich, A.B., Korkh, Y.V., Klepikova, A.S. et al. Quality Characterization of CVD-Synthesized Graphene Films by Scanning Probe Microscopy. Dokl. Phys. 65, 362–365 (2020). https://doi.org/10.1134/S1028335820100055

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  • DOI: https://doi.org/10.1134/S1028335820100055

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