The cutting tool is prone to wear and failure during turning process, which affects the quality of the machined surface. In order to increase the hardness, wear resistance, and extend lifespan of the cutting tool, this work proposed a CrCN super-hard coating and optimized its parameters of preparation process. The CrCN super-hard coating was deposited on cemented carbides by radio frequency reactive magnetron sputtering. Cr₃C₂ (99.9%) was selected as the target, N₂ and Ar as the reaction gas. The effects of power, N₂/Ar flow ratio, deposition temperature, and deposition pressure on the properties of deposited CrCN super-hard coatings were investigated. The deposition rate, Vickers hardness, crystal degree, and surface morphology of the coating were comprehensive analyzed, and then, the optimal parameters for preparing CrCN super-hard coating were obtained: sputtering power of 300 W, N₂/Ar gas flow ratio of 4/46 sccm, deposition temperature of 200 °C, and deposition pressure of 0.8 Pa. After measurement, the physical and mechanical properties of the CrCN super-hard coating were: the thickness of 1.8 μm, the hardness of 2700 HV, and the bonding force of 52 N.

切削刀具在车削过程中容易磨损和损坏，从而影响加工表面的质量。为了提高刀具的硬度，耐磨性并延长其使用寿命，该工作提出了一种CrCN超硬涂层，并优化了其制备工艺参数。CrCN超硬涂层通过射频反应磁控溅射法沉积在硬质合金上。选择Cr ₃ C ₂（99.9％）作为目标，选择N ₂和Ar作为反应气体。功率的影响，N ₂研究了/ Ar流量比，沉积温度和沉积压力对沉积的CrCN超硬涂层性能的影响。综合分析了涂层的沉积速率，维氏硬度，结晶度和表面形貌，得出了制备CrCN超硬涂层的最佳参数：溅射功率300 W，N ₂ / Ar气体流量比4/46 sccm，沉积温度为200°C，沉积压力为0.8 Pa。测量后，CrCN超硬涂层的物理和机械性能为：厚度为1.8μm，硬度为2700 HV，并且结合力为52N。