Diamond sensors provide a promising radiation hard solution to the challenges posed by the future experiments at hadron machines. A 3D geometry with thin columnar resistive electrodes orthogonal to the diamond surface, obtained by laser nanofabrication, is expected to provide significantly better time resolution with respect to the extensively studied planar diamond sensors. We report on the development, production, and characterisation of innovative 3D diamond sensors achieving 30% improvement in both space and time resolution with respect to sensors from the previous generation. This is the first complete characterisation of the time resolution of 3D diamond sensors and combines results from tests with laser, β rays and high energy particle beams. Plans and strategies for further improvement in the fabrication technology and readout systems are also discussed.

钻石传感器为未来强子机器实验带来的挑战提供了一种有希望的辐射硬解决方案。与广泛研究的平面金刚石传感器相比，通过激光纳米加工获得的具有与金刚石表面正交的薄圆柱状电阻电极的3D几何形状有望提供更好的时间分辨率。我们报告了创新的3D钻石传感器的开发，生产和特性，与上一代传感器相比，其在空间和时间分辨率上均提高了30％。这是3D金刚石传感器时间分辨率的第一个完整表征，并将激光，β射线和高能粒子束的测试结果结合在一起。