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Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage
The International Journal of Advanced Manufacturing Technology ( IF 2.9 ) Pub Date : 2020-11-03 , DOI: 10.1007/s00170-020-06274-x
Fan-Chun Kuo , Chekang Hsu , Meng-Ru Hsieh , Jia-Yush Yen , Liang-Chia Chen , Tien-Tung Chung , Fu-Cheng Wang

This note addresses the transient behavior of the different point-to-point motion control strategies. The transition between the high-speed velocity control and the high-precision position feedback often leads to undesirable overshoot and residual oscillation. This study first introduces the use of an integrated H-chain scattering description (CSD) synthesized controller for a unified point-to-point motion to a high-precision positioning control without switching. This study then compares the control effects with the s-curve trajectory control and an augmented Luenberger observer (ALO)-based control. The s-curve control is a position-dependent implementation and has to be converted into a time-domain trajectory for practical implementation. It is desirable to examine if the trajectory error would accumulate into a large overshoot. The ALO uses an auxiliary system to suppress the thrust ripple but is slower compared with the acceleration-based H-CSD and s-curve control. It is interesting to see that the H-CSD controller automatically reaches a similar performance as the s-curve trajectory. Both the s-curve and the H-CSD control algorithms achieve access time in the range of 200 ms for a 10-mm travel. It is also interesting to notice that the time-domain error for the s-curve trajectory does not accumulate, and the overshoot is < 0.08%. As a comparison, the access time for the integrated H-CSD controller is 195 ms with an overshoot of 0.097%, and the access time for the s-curve trajectory control is 212 ms with an overshoot of 0.016%.



中文翻译:

双轴空气轴承平面位移台对点到点运动控制的瞬态响应研究

本说明介绍了不同点对点运动控制策略的瞬态行为。高速速度控制和高精度位置反馈之间的转换通常会导致不良的过冲和残留振动。这项研究首先介绍了采用一体化的^ h 链散射描述(CSD)合成控制器,用于统一点对点运动,无需切换即可进行高精度定位控制。然后,本研究将控制效果与s曲线轨迹控制和基于增强的Luenberger观测器(ALO)的控制进行了比较。s曲线控制是一个与位置有关的实现,必须转换为时域轨迹才能进行实际实现。期望检查轨迹误差是否会累积成较大的过冲。所述ALO使用辅助系统以抑制推力波动,但与基于加速度慢相比ħ -CSD和s曲线控制。有趣的是,看到^ h -CSD控制器自动达到与S曲线轨迹相似的性能。两个S曲线和ħ -CSD控制算法实现的存取时间为200毫秒,对于10毫米的行程的范围内。还值得注意的是,s曲线轨迹的时域误差没有累积,并且超调量<0.08%。作为比较,对于集成的访问时间ħ -CSD控制器195毫秒的0.097%的过冲,并为s曲线轨迹控制的存取时间为212毫秒的0.016%的过冲。

更新日期:2020-11-04
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