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Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage

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Abstract

This note addresses the transient behavior of the different point-to-point motion control strategies. The transition between the high-speed velocity control and the high-precision position feedback often leads to undesirable overshoot and residual oscillation. This study first introduces the use of an integrated H∞-chain scattering description (CSD) synthesized controller for a unified point-to-point motion to a high-precision positioning control without switching. This study then compares the control effects with the s-curve trajectory control and an augmented Luenberger observer (ALO)-based control. The s-curve control is a position-dependent implementation and has to be converted into a time-domain trajectory for practical implementation. It is desirable to examine if the trajectory error would accumulate into a large overshoot. The ALO uses an auxiliary system to suppress the thrust ripple but is slower compared with the acceleration-based H∞-CSD and s-curve control. It is interesting to see that the H∞-CSD controller automatically reaches a similar performance as the s-curve trajectory. Both the s-curve and the H∞-CSD control algorithms achieve access time in the range of 200 ms for a 10-mm travel. It is also interesting to notice that the time-domain error for the s-curve trajectory does not accumulate, and the overshoot is < 0.08%. As a comparison, the access time for the integrated H∞-CSD controller is 195 ms with an overshoot of 0.097%, and the access time for the s-curve trajectory control is 212 ms with an overshoot of 0.016%.

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Acknowledgments

The research is supported by the Ministry of Science and Technologies, Taiwan, under project no. MOST-107-2218-E-002 -002 and MOST-107-2321-B-002-040.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Taiwan University, Taiwan, Republic of China

    Fan-Chun Kuo, Chekang Hsu, Meng-Ru Hsieh, Jia-Yush Yen, Liang-Chia Chen, Tien-Tung Chung & Fu-Cheng Wang

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Correspondence to Jia-Yush Yen.

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Kuo, FC., Hsu, C., Hsieh, MR. et al. Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage. Int J Adv Manuf Technol 111, 2759–2772 (2020). https://doi.org/10.1007/s00170-020-06274-x

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