Air bearing spindles (ABS) can meet high accuracy demands for the precise rotation motion, which adopt air bearings to support spindle shaft, and the spindle shaft directly connects the motor rotor. The unbalanced electromagnetic force caused by motor rotor eccentricity (MRE) and air pressure fluctuation (APF) are two important influential factors to the dynamic performance of the spindle system and machining surface quality. This paper addresses the problems of measuring the MRE and APF in an ABS through testing machining surface topography. A permanent magnet synchronous motor (PMSM) was modelled by finite element simulation (FES). Through FES it found that the MRE between the motor rotor and stator hole produced a radial magnetic force (RMF), which could cause ABS to periodically vibrate in the axial direction. Besides, the change of the air supply caused the stiffness variation of ABS and result in the tilt error motions of the spindle shaft. A theoretical model of machining surface topography considering MRE and APF was then proposed for the first time, which revealed that the MRE and APF resulted in the periodic fluctuations of the machining surface topography. The overall surface topography then became grooved surfaces. The above findings were finally validated by measurement results of ultraprecision diamond turning experiments.

空气轴承主轴（ABS）可以满足精确旋转运动的高精度要求，该轴承采用空气轴承支撑主轴，主轴直接与电动机转子连接。由电动机转子偏心率（MRE）和气压波动（APF）引起的不平衡电磁力是影响主轴系统动态性能和加工表面质量的两个重要影响因素。本文通过测试加工表面形貌来解决在ABS中测量MRE和APF的问题。通过有限元模拟（FES）对永磁同步电动机（PMSM）进行建模。通过FES，发现电动机转子和定子孔之间的MRE产生了径向磁力（RMF），这可能导致ABS沿轴向周期性振动。除了，空气供应的变化导致ABS的刚度变化，并导致主轴倾斜运动。然后首次提出了考虑MRE和APF的加工表面形貌的理论模型，这表明MRE和APF导致了加工表面形貌的周期性波动。然后，整个表面形貌变为带凹槽的表面。以上发现最终通过超精密金刚石车削实验的测量结果得到了验证。然后，整个表面形貌变为带凹槽的表面。以上发现最终通过超精密金刚石车削实验的测量结果得到了验证。然后，整个表面形貌变为带凹槽的表面。以上发现最终通过超精密金刚石车削实验的测量结果得到了验证。