This study presents a bone conduction microphone (BCM) to detect the variation of air pressure resulted from the skull vibration. The presented BCM consists of a commercial MEMS microphone, the sensing circuits, the bulk metal, the deformable polymer diaphragm, and two printed circuit board (PCB) covers. In this design, two chambers and a vibrating spring-mass structure are hermetic sealed by two PCB covers. As the spring-mass structure vibrates, the pressure of one chamber will increase and that of another will decrease. Thus, the vibration could introduce a higher pressure load as well as a larger sensing signal for the BCM. In application, the device with the dimensions of 3.5 × 2.65 × 1.48 mm 3 is implemented. Measurements show the device has a sensitivity of −38.8 dBV, THD < 0.48% at 1 kHz with 1 g excitation, and ±5 dB bandwidth for 100 Hz∼6.7 kHz. Frequency responses of different samples show good repeatability. Furthermore, air leakage effect and crosstalk o...

中文翻译：

---

骨传导麦克风双压力变化腔的设计与实现

这项研究提出了一种骨传导麦克风（BCM），用于检测由颅骨振动引起的气压变化。提出的BCM由商用MEMS麦克风，感应电路，大块金属，可变形的聚合物膜片和两个印刷电路板（PCB）盖组成。在这种设计中，两个腔室和一个振动的弹簧质量结构被两个PCB盖密封。随着弹簧质量结构的振动，一个腔室的压力将增加，而另一个腔室的压力将减小。因此，对于BCM，振动可能会引入较高的压力负载以及较大的感测信号。在应用中，实现了尺寸为3.5×2.65×1.48 mm 3的设备。测量显示，该器件的灵敏度为-38.8 dBV，在1 kHz激励下1 kHz时THD <0.48％，100 Hz至6.7 kHz的带宽为±5 dB。不同样品的频率响应显示出良好的重复性。此外，漏气效果和串扰会影响到...