Microholes have crucial applications in aerospace, the automotive industry, and other industries. In this study, the microhole processing technology based on the femtosecond-laser spiral trepanning method was investigated. By adjusting the spiral scanning path, laser power distribution, and defocusing amount to control laser energy distribution, an inverted cone hole, straight hole, and normal cone hole were obtained finally. The morphology and element of the microhole were investigated by scanning electron microscopy (SEM) equipped with energy-dispersive X-ray spectroscopy (EDX). The experimental results of the femtosecond-laser spiral trepanning method could achieve fewer impurities. Finally, the formation mechanisms of different microholes are explained in detail. The method is simpler and more efficient than the traditional microhole processing technology. The femtosecond-laser spiral trepanning method with controllable hole roundness, accuracy, and taper has important practical significance in microhole processing.

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飞秒激光螺旋刻蚀法的微孔加工技术研究

微孔在航空航天，汽车工业和其他行业中具有至关重要的应用。本文研究了基于飞秒激光螺旋刻蚀法的微孔加工技术。通过调节螺旋扫描路径，激光功率分布和散焦量以控制激光能量分布，最终获得了倒锥孔，直孔和法向锥孔。通过配备有能量色散X射线光谱仪（EDX）的扫描电子显微镜（SEM）研究了微孔的形态和元素。飞秒激光螺旋击穿方法的实验结果可以减少杂质。最后，详细解释了不同微孔的形成机理。该方法比传统的微孔加工技术更简单，更高效。具有可控的圆度，精度和锥度的飞秒激光螺旋刻蚀方法在微孔加工中具有重要的现实意义。