To improve the low-frequency isolation performance of optical platforms, an electromagnetic active-negative-stiffness generator (EANSG) was proposed, using nano-resolution laser interferometry sensors to monitor the micro-vibration of an optical platform, and precision electromagnetic actuators integrated with a relative displacement feedback strategy to counteract the positive stiffness of pneumatic springs within a micro-vibration stroke, thereby producing high-static-low-dynamic stiffness characteristics. The effectiveness of the method was verified by both theoretical and experimental analyses. The experimental results show that the vertical natural frequency of the optical platform was reduced from 2.00 to 1.37 Hz, the root mean square of displacement was reduced from 1.28 to 0.69 μm, and the root mean square of velocity was reduced from 14.60 to 9.33 μm/s, proving that the proposed method can effectively enhance the low frequency isolation performance of optical platforms.

中文翻译：

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电磁主动-负刚度方法改善光平台的低频隔离性能

为了提高光学平台的低频隔离性能，提出了一种电磁主动-负刚度发生器（EANSG），它使用纳米分辨率的激光干涉传感器监测光学平台的微振动，并集成了精密电磁执行器。一种相对位移反馈策略，以抵消微振动冲程内气动弹簧的正刚度，从而产生高静态-低动态刚度特性。理论和实验分析均验证了该方法的有效性。实验结果表明，光学平台的垂直固有频率从2.00降低到1.37 Hz，位移的均方根从1.28降低到0.69μm，速度的均方根从14降低。