Abstract

Integral expressions are obtained for the reflectance and transmittance spectra of a structure that is formed by two thin layers deposited on opposite faces of a plane-parallel substrate and that is obliquely illuminated with partially coherent light. As a result of an asymptotic analysis of the integrals, approximate analytical formulas are found for calculating the indicated spectra, which are convenient for use to solve inverse spectrophotometry problems. An aluminum doped zinc oxide layer deposited on a glass substrate is studied. The spectra of the refractive indices and absorbances of the layer and the substrate, as well as the layer thickness, are restored by processing the reflectance and transmittance spectra of the structure measured for s- and p-polarized waves at two angles of incidence of the light on the structure. The found parameters of the structure are used in computational experiments to estimate the applicability limits of the formulated approximations.

中文翻译：

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平面平行基板上各层的分光光度法

摘要

对于由在平面平行基板的相对面上沉积的两个薄层形成的结构的反射率和透射率光谱，获得了积分表达式，该结构由部分相干的光倾斜照射。对积分进行渐近分析的结果是，找到了用于计算指示光谱的近似解析公式，这些解析公式便于解决反分光光度法的问题。研究了沉积在玻璃基板上的铝掺杂氧化锌层。通过处理针对s-和p测得的结构的反射光谱和透射光谱，可以恢复该层和基材的折射率和吸收光谱以及层厚。偏振光在结构上以两个入射角入射。所发现的结构参数在计算实验中用于估计公式近似值的适用范围。