Abstract—The possibility and efficiency of laser excitation of the elastic vibrations in microoptoelectromechanical systems under the action of recoil force upon an external photoeffect have been analyzed. It has been shown that this mechanism of vibration excitation can be an order of magnitude more effective than the light pressure in these systems based on GaAs. The proposed method of creating such systems opens up opportunities for developing new types of high-speed optical functional elements controlled by light.

中文翻译：

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微光机电系统中弹性振动的激光光激发

摘要—分析了在反冲力对外部光电效应的作用下，激光在微光电机电系统中激发弹性振动的可能性和效率。已经表明，在这些基于GaAs的系统中，这种振动激励机制比光压有效得多一个数量级。提出的创建这种系统的方法为开发新型的受光控制的高速光学功能元件打开了机会。