Abstract—The possibility and efficiency of laser excitation of the elastic vibrations in microoptoelectromechanical systems under the action of recoil force upon an external photoeffect have been analyzed. It has been shown that this mechanism of vibration excitation can be an order of magnitude more effective than the light pressure in these systems based on GaAs. The proposed method of creating such systems opens up opportunities for developing new types of high-speed optical functional elements controlled by light.
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Translated by N. Petrov
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Egorov, F.A. Laser Photoemission Excitation of Elastic Vibrations in Microoptoelectromechanical Systems. Tech. Phys. Lett. 46, 661–664 (2020). https://doi.org/10.1134/S1063785020070081
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DOI: https://doi.org/10.1134/S1063785020070081