Indium tin oxide (ITO) has become a very useful plasmonic and nonlinear optical material because of its highly tunable electrical and optical properties and strong optical nonlinearity. In this work, the authors conducted detailed fabrication process studies by using high-temperature reactive sputtering to finely tune the optical properties of ITO thin films, particularly the epsilon-near-zero (ENZ) wavelength in the near and mid-IR spectrum. Sputtered ITO thin films are characterized by using spectroscopic ellipsometry, surface profilometry, Hall measurements, and 4-point probe testing. Additionally, the effect of post-deposition annealing of ITO films is also investigated.

中文翻译：

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用于超材料完美吸收器和非线性器件的可调谐氧化铟锡

氧化铟锡（ITO）由于其高度可调的电学和光学特性以及很强的光学非线性，已成为一种非常有用的等离子体和非线性光学材料。在这项工作中，作者通过使用高温反应溅射来微调 ITO 薄膜的光学特性，尤其是近红外和中红外光谱中的 epsilon-near-zero (ENZ) 波长，进行了详细的制造工艺研究。溅射 ITO 薄膜的特征在于使用光谱椭偏仪、表面轮廓仪、霍尔测量和 4 点探针测试。此外，还研究了 ITO 薄膜沉积后退火的影响。