An enhanced circulating cooling water (CCW) machine is developed to simultaneously achieve high temperature stability and dynamic performance of CCW temperature control. Dynamic thermal filtering based on an auto-updatable thermal capacity medium is proposed to reduce the temperature fluctuation of the CCW. Agile thermal control is presented to realize a quick response and high resolution of temperature control, through thermal inertia minimization and bidirectional regulation of heating/cooling power. Experimental results indicate that a temperature stability of ±3 mK (peak to peak value) and a settling time of 128 s, corresponding to a 1 K step set value, are achieved. It can therefore be concluded that the developed machine can satisfy the challenging requirements of precision manufacturing.

中文翻译：

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动态热过滤可快速响应±3 mK的循环水冷却

开发了一种增强型循环冷却水（CCW）机器，以同时实现CCW温度控制的高温稳定性和动态性能。提出了一种基于自动更新热容介质的动态热过滤技术，以减少CCW的温度波动。提出了敏捷热控制，通过最小化热惯性和双向调节加热/冷却功率来实现快速响应和高分辨率的温度控制。实验结果表明，获得了±3 mK（峰峰值）的温度稳定性和128 s的建立时间，对应于1 K的阶跃设定值。因此可以得出结论，开发的机器可以满足精密制造的挑战性要求。